Structured light has gained significant attention in recent years, especially in the generation and application of vector beams. These beams, characterized by a spatially varying polarization state, are a powerful tool to enhance our capacity to control light-matter interactions. In this study, we demonstrate the synthesis of extreme-ultraviolet (EUV) vector beams in a chip through high-order harmonic generation (HHG). Our findings showcase the chip's ability to transfer the laser polarization state into the EUV beam despite the extended interaction length. This approach not only outperforms conventional free-space methods but also paves the way for a multitude of on-chip investigations in the realms of EUV and soft-X-ray spectroscopy.
