Optical tools for laser machining along six orders of magnitude

التفاصيل البيبلوغرافية
العنوان: Optical tools for laser machining along six orders of magnitude
المؤلفون: Hellstern, Julian, Tillkorn, Christoph, Hieronymus, Tim, Kaiser, Myriam, Beck, Torsten, Flamm, Daniel
المصدر: Proc. SPIE 12878, High-Power Laser Materials Processing: Applications, Diagnostics, and Systems XIII, 1287802 (12 March 2024)
سنة النشر: 2024
المجموعة: Physics (Other)
مصطلحات موضوعية: Physics - Optics
الوصف: We present an overview on the development and characterization of multiscale laser processing optics for versatile material modifications across more than six orders of magnitude. Starting with solutions for micromachining we present high-NA microscope objectives creating sub-wavelength material modifications on macroscopic scales with highest peak intensities. Moving on to the millimeter range, the adaptability and scalability of scanning optics is examined for large-area machining. Finally, we explore line beam optics in the meter range, evaluating their use in uniform material processing using average powers above 100kW. This study provides an insight into the design and performance characteristics of such optics and demonstrates their potential in advanced laser processing.
Comment: Review article with 12 pages, 15 figures and 74 references
نوع الوثيقة: Working Paper
DOI: 10.1117/12.3002211
URL الوصول: http://arxiv.org/abs/2403.19250
رقم الأكسشن: edsarx.2403.19250
قاعدة البيانات: arXiv