A nanothin film-based antimicrobial coating has been attractive in response to the rise and spread of pathogenic microbes, which led to the development of low-cost, effective, and rapid disinfection methods for coating material. TiO2/ZnO bilayer thin films have been developed through magnetron sputtering and thermal oxidation. The influence of oxidation temperature on structural, optical, photocatalytic, photostability, and antimicrobial properties of Ti/ZnO thin films has been addressed. X-ray diffraction (XRD) analysis has shown the presence of hexagonal wurtzite ZnO, Ti0.895O.77, and anatase TiO2 in the bilayer films. Increasing the oxidation temperature reveals a certain degree of crystallization and transforms Ti0.895O.77 into the anatase/rutile TiO2 phase. The bottom layer of ZnO provides sufficient oxygen to improve TiO2 crystallinity and prevent transforming anatase to rutile during thermal oxidation process. Moreover, Ti/ZnO thermally oxidized at 550 °C exhibit excellent photocatalytic performance under UV irradiation with high photostability. The inhibition rate increased (p
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