دورية أكاديمية
أعرض في EDS

Uniform Pressing Mechanism in Large-Area Roll-to-Roll Nanoimprint Lithography Process

التفاصيل البيبلوغرافية
العنوان: Uniform Pressing Mechanism in Large-Area Roll-to-Roll Nanoimprint Lithography Process
المؤلفون: Ga Eul Kim, Hyuntae Kim, Kyoohee Woo, Yousung Kang, Seung-Hyun Lee, Yongho Jeon, Moon G. Lee, Sin Kwon
المصدر: Applied Sciences, Vol 11, Iss 20, p 9571 (2021)
بيانات النشر: MDPI AG, 2021.
سنة النشر: 2021
المجموعة: LCC:Technology
LCC:Engineering (General). Civil engineering (General)
LCC:Biology (General)
LCC:Physics
LCC:Chemistry
مصطلحات موضوعية: roller bending, contact pressure, roll-to-roll process, nanoimprint lithography, high productivity, Technology, Engineering (General). Civil engineering (General), TA1-2040, Biology (General), QH301-705.5, Physics, QC1-999, Chemistry, QD1-999
الوصف: We aimed to increase the processing area of the roll-to-roll (R2R) nanoimprint lithography (NIL) process for high productivity, using a long roller. It is common for a long roller to have bending deformation, geometric errors and misalignment. This causes the non-uniformity of contact pressure between the rollers, which leads to defects such as non-uniform patterning. The non-uniformity of the contact pressure of the conventional R2R NIL system was investigated through finite element (FE) analysis and experiments in the conventional system. To solve the problem, a new large-area R2R NIL uniform pressing system with five multi-backup rollers was proposed and manufactured instead of the conventional system. As a preliminary experiment, the possibility of uniform contact pressure was confirmed by using only the pressure at both ends and one backup roller in the center. A more even contact pressure was achieved by using all five backup rollers and applying an appropriate pushing force to each backup roller. Machine learning techniques were applied to find the optimal combination of the pushing forces. In the conventional pressing process, it was confirmed that pressure deviation of the contact area occurred at a level of 44%; when the improved system was applied, pressure deviation dropped to 5%.
نوع الوثيقة: article
وصف الملف: electronic resource
اللغة: English
تدمد: 2076-3417
Relation: https://www.mdpi.com/2076-3417/11/20/9571; https://doaj.org/toc/2076-3417
DOI: 10.3390/app11209571
URL الوصول: https://doaj.org/article/0a2747fac3a3436bb2bf6fdf48f30119
رقم الأكسشن: edsdoj.0a2747fac3a3436bb2bf6fdf48f30119
قاعدة البيانات: Directory of Open Access Journals
الوصف
تدمد:20763417
DOI:10.3390/app11209571