In this study, we deposited zinc oxide (ZnO) and aluminum-doped zinc oxide (AZO) on the electroless nickel immersion gold (ENIG) of a flexible printed circuit board (FPCB) as a potentiometric pH sensor. The sensing films of the pH sensor were fabricated by a radio frequency (RF) sputtering system and analyzed by field emission scanning electron microscope (FE-SEM) and X-ray photoelectron spectroscopy (XPS). In the pH 2 to 10 buffer solutions, it was observed that the characteristics of the pH sensor through the voltage–time (V-T) measurement system include average sensitivity and linearity, drift effect, and repeatability. According to the experimental results, the pH sensors in this study could exhibit good characteristics.
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