دورية أكاديمية
Adaptive Abstraction-Level Conversion Framework for Accelerated Discrete-Event Simulation in Smart Semiconductor Manufacturing
| العنوان: | Adaptive Abstraction-Level Conversion Framework for Accelerated Discrete-Event Simulation in Smart Semiconductor Manufacturing |
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| المؤلفون: | Moon Gi Seok, Wentong Cai, Hessam S. Sarjoughian, Daejin Park |
| المصدر: | IEEE Access, Vol 8, Pp 165247-165262 (2020) |
| بيانات النشر: | IEEE, 2020. |
| سنة النشر: | 2020 |
| المجموعة: | LCC:Electrical engineering. Electronics. Nuclear engineering |
| مصطلحات موضوعية: | Abstraction-level conversion, wafer fabrication, discrete-event modeling, smart manufacturing, Electrical engineering. Electronics. Nuclear engineering, TK1-9971 |
| الوصف: | Speeding up the simulation of discrete-event wafer-fabrication models is essential for fast decision-making to handle unexpected events in smart semiconductor manufacturing because decision-parameter optimization requires repeated simulation execution based on the current manufacturing situation. In this paper, we present a runtime abstraction-level conversion approach for discrete-event fab models to gain simulation speedup. During the simulation, if the fab's machine group model reaches a steady state, then the proposed method attempts to substitute this group model with a mean-delay model (MDM) as a high abstraction level model. The MDM abstracts detailed event-driven operations of subcomponents in the group into an average delay based on the queuing modeling, which can guarantee acceptable accuracy in predicting the performance of steady-state queuing systems. To detect the steadiness, the proposed abstraction-level converter (ALC) observes the queuing parameters of low-level groups to identify the statistical convergence of each group's work-in-progress (WIP) level. When a group's WIP level is converged, the output-to-input couplings between the models are revised to change a wafer-lot process flow from the low-level group to a MDM. When the ALC detects lot-arrival changes or any wafer processing status change (e.g., a machine-down), the high-level model is switched back to its corresponding low-level group model. During high-to-low level conversion, the ALC generates dummy wafer-lot events to re-initialize the machine states. The proposed method was applied to various case studies of wafer-fab systems and achieved simulation speedups up to about 4 times with 0.6 to 8.3% accuracy degradations. |
| نوع الوثيقة: | article |
| وصف الملف: | electronic resource |
| اللغة: | English |
| تدمد: | 2169-3536 39089126 |
| Relation: | https://ieeexplore.ieee.org/document/9187270/; https://doaj.org/toc/2169-3536 |
| DOI: | 10.1109/ACCESS.2020.3022275 |
| URL الوصول: | https://doaj.org/article/3908912631df4791b528295c73a5f5f6 |
| رقم الأكسشن: | edsdoj.3908912631df4791b528295c73a5f5f6 |
| قاعدة البيانات: | Directory of Open Access Journals |
Full Text Finder | تدمد: | 21693536 39089126 |
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| DOI: | 10.1109/ACCESS.2020.3022275 |