In this paper, a new type of magnetic fluid deformable mirror (MFDM) with a two-layer layout of actuators is proposed to improve the correction performance for full-order aberrations with a high spatial resolution. The shape of the magnetic fluid surface is controlled by the combined magnetic field generated by the Maxwell coil and the two-layer array of miniature coils. The upper-layer actuators which have a small size and high density are used to compensate for small-amplitude high-order aberrations and the lower-layer actuators which have a big size and low density are used to correct large-amplitude low-order aberrations. The analytical model of this deformable mirror is established and the aberration correction performance is verified by the experimental results. As a new kind of wavefront corrector, the MFDM has major advantages such as large stroke, low cost, and easy scalability and fabrication.
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