دورية أكاديمية

Research on Micro/Nano Surface Flatness Evaluation Method Based on Improved Particle Swarm Optimization Algorithm

التفاصيل البيبلوغرافية
العنوان: Research on Micro/Nano Surface Flatness Evaluation Method Based on Improved Particle Swarm Optimization Algorithm
المؤلفون: Han Shu, Chunlong Zou, Jianyu Chen, Shenghuai Wang
المصدر: Frontiers in Bioengineering and Biotechnology, Vol 9 (2021)
بيانات النشر: Frontiers Media S.A., 2021.
سنة النشر: 2021
المجموعة: LCC:Biotechnology
مصطلحات موضوعية: flatness error, micro/nano surface, improved particle swarm optimization algorithm, minimum zone method, uncertainty, AFM, Biotechnology, TP248.13-248.65
الوصف: Flatness error is an important factor for effective evaluation of surface quality. The existing flatness error evaluation methods mainly evaluate the flatness error of a small number of data points on the micro scale surface measured by CMM, which cannot complete the flatness error evaluation of three-dimensional point cloud data on the micro/nano surface. To meet the needs of nano scale micro/nano surface flatness error evaluation, a minimum zone method on the basis of improved particle swarm optimization (PSO) algorithm is proposed. This method combines the principle of minimum zone method and hierarchical clustering method, improves the standard PSO algorithm, and can evaluate the flatness error of nano scale micro/nano surface image data point cloud scanned by atomic force microscope. The influence of the area size of micro/nano surface topography data on the flatness error evaluation results is analyzed. The flatness evaluation results and measurement uncertainty of minimum region method, standard least squares method, and standard PSO algorithm on the basis of the improved PSO algorithm are compared. Experiments show that the algorithm can stably evaluate the flatness error of micro/nano surface topography point cloud data, and the evaluation result of flatness error is more reliable and accurate than standard least squares method and standard PSO algorithm.
نوع الوثيقة: article
وصف الملف: electronic resource
اللغة: English
تدمد: 2296-4185
08671494
Relation: https://www.frontiersin.org/articles/10.3389/fbioe.2021.775455/full; https://doaj.org/toc/2296-4185
DOI: 10.3389/fbioe.2021.775455
URL الوصول: https://doaj.org/article/5fbfc9d08671494d9161618d49701064
رقم الأكسشن: edsdoj.5fbfc9d08671494d9161618d49701064
قاعدة البيانات: Directory of Open Access Journals
الوصف
تدمد:22964185
08671494
DOI:10.3389/fbioe.2021.775455