دورية أكاديمية
Design and optimization of ferric chloride and oxalic acid based slurry to chemically mechanically polish stainless steel
| العنوان: | Design and optimization of ferric chloride and oxalic acid based slurry to chemically mechanically polish stainless steel |
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| المؤلفون: | Zeyu WANG, Yanan PENG, Jianxiu SU, Jiapeng CHEN |
| المصدر: | Jin'gangshi yu moliao moju gongcheng, Vol 43, Iss 4, Pp 497-503 (2023) |
| بيانات النشر: | Zhengzhou Research Institute for Abrasives & Grinding Co., Ltd., 2023. |
| سنة النشر: | 2023 |
| المجموعة: | LCC:Materials of engineering and construction. Mechanics of materials LCC:Mechanical engineering and machinery |
| مصطلحات موضوعية: | chemical-mechanical planarization, 304 stainless steel, ferric chloride-oxalic acid, material removal rate, surface roughness, Materials of engineering and construction. Mechanics of materials, TA401-492, Mechanical engineering and machinery, TJ1-1570 |
| الوصف: | To enhance the chemical mechanical polishing (CMP) efficiency of flexible display substrates, a polishing slurry based on ferric chloride and oxalic acid was proposed for polishing 304 stainless steel substrates. An orthogonal optimization test was designed to determine the significance order of the influence of abrasive size, abrasive content, oxalic acid content and ferric chloride content on the material removal rate (MRR) and surface roughness (surface arithmetical mean height of area, Sa). The aim was to investigate the effects of ferric chloride and oxalic acid on MRR. An optimized polishing slurry capable of achieving an MRR of over 560 nm/min and a Sa as low as 8 nm after 30 min was obtain. Compared with the conventional polishing slurry, whose MRR is 226.56 nm/min, the novel slurry has doubled its polishing efficiency or more. |
| نوع الوثيقة: | article |
| وصف الملف: | electronic resource |
| اللغة: | Chinese |
| تدمد: | 1006-852X |
| Relation: | https://doaj.org/toc/1006-852X |
| DOI: | 10.13394/j.cnki.jgszz.2022.0159 |
| URL الوصول: | https://doaj.org/article/a6322fd759ab49af849b9749f800ed77 |
| رقم الأكسشن: | edsdoj.6322fd759ab49af849b9749f800ed77 |
| قاعدة البيانات: | Directory of Open Access Journals |
Full Text Finder | تدمد: | 1006852X |
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| DOI: | 10.13394/j.cnki.jgszz.2022.0159 |