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A novel evolutionary method for parameter-free MEMS structural design and its application in piezoresistive pressure sensors

التفاصيل البيبلوغرافية
العنوان: A novel evolutionary method for parameter-free MEMS structural design and its application in piezoresistive pressure sensors
المؤلفون: Qinggang Meng, Junbo Wang, Deyong Chen, Jian Chen, Bo Xie, Yulan Lu
المصدر: Microsystems & Nanoengineering, Vol 9, Iss 1, Pp 1-8 (2023)
بيانات النشر: Nature Publishing Group, 2023.
سنة النشر: 2023
المجموعة: LCC:Technology
LCC:Engineering (General). Civil engineering (General)
مصطلحات موضوعية: Technology, Engineering (General). Civil engineering (General), TA1-2040
الوصف: Abstract In this paper, a novel simulation-based evolutionary method is presented for designing parameter-free MEMS structures with maximum degrees of freedom. This novel design method enabled semiautomatic structure evolution by weighing the attributes of each segment of the structure and yielded an optimal design after multiple iterations. The proposed method was utilized to optimize the pressure-sensitive diaphragm of a piezoresistive pressure sensor (PPS). Finite element method (FEM) simulations revealed that, in comparison to conventional diaphragms without islands and with square islands, the optimized diaphragm increased the stress by 10% and 16% and reduced the nonlinearity by 57% and 77%, respectively. These improvements demonstrate the value of this method. Characterization of the fabricated PPS revealed a high sensitivity of 8.8 mV V−1 MPa−1 and a low nonlinearity of 0.058% FS at 20 °C, indicating excellent sensor performance.
نوع الوثيقة: article
وصف الملف: electronic resource
اللغة: English
تدمد: 2055-7434
Relation: https://doaj.org/toc/2055-7434
DOI: 10.1038/s41378-023-00596-y
URL الوصول: https://doaj.org/article/c65ec9b9a4b841d2ae96a1d702756d28
رقم الأكسشن: edsdoj.65ec9b9a4b841d2ae96a1d702756d28
قاعدة البيانات: Directory of Open Access Journals
الوصف
تدمد:20557434
DOI:10.1038/s41378-023-00596-y