A bandgap bowing parameter of 0.4 ± 0.2 eV for β-(AlxGa1−x)2O3 alloys, with Al compositions (x) up to 0.35, has been determined from the bandgap obtained from low temperature optical reflectivity, which suppresses the effect of electron–phonon interaction on the bandgap. A length scale of inhomogeneity of 0.21 ± 0.03 times of the electron–hole mean free path length has been estimated for β-(AlxGa1−x)2O3 alloys. The unit cell of β-(AlxGa1−x)2O3 alloys compresses, and the lattice parameters vary linearly with Al substitution. Our results provide insight into bandgap engineering and alloy disorder for β-(AlxGa1−x)2O3 alloys, which are an important material system for applications in deep ultraviolet opto-electronic devices.
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