دورية أكاديمية
Sensing Performance of Precisely Ordered TiO2 Nanowire Gas Sensors Fabricated by Electron-Beam Lithography
| العنوان: | Sensing Performance of Precisely Ordered TiO2 Nanowire Gas Sensors Fabricated by Electron-Beam Lithography |
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| المؤلفون: | Chao-Hao Chen, Chun-Yen Kuo, Yu-Hsuan Ho, Wei-Cheng Tian |
| المصدر: | Sensors, Vol 13, Iss 1, Pp 865-874 (2013) |
| بيانات النشر: | MDPI AG, 2013. |
| سنة النشر: | 2013 |
| المجموعة: | LCC:Chemical technology |
| مصطلحات موضوعية: | temperature effect, TiO2 nanowire, gas sensors, electro-beam lithography, Chemical technology, TP1-1185 |
| الوصف: | In this study, electron beam lithography, rather than the most popular method, chemical synthesis, is used to construct periodical TiO2 nanowires for a gas sensor with both robust and rapid performance. The effects of temperature on the sensing response and reaction time are analyzed at various operation temperatures ranging from 200 to 350 °C. At the optimized temperature of 300 °C, the proposed sensor repeatedly obtained a rise/recovery time (ΔR: 0.9 R0 to 0.1 R0) of 3.2/17.5 s and a corresponding sensor response (ΔR/R0) of 21.7% at an ethanol injection mass quantity of 0.2 μg. |
| نوع الوثيقة: | article |
| وصف الملف: | electronic resource |
| اللغة: | English |
| تدمد: | 1424-8220 95805427 |
| Relation: | http://www.mdpi.com/1424-8220/13/1/865; https://doaj.org/toc/1424-8220 |
| DOI: | 10.3390/s130100865 |
| URL الوصول: | https://doaj.org/article/697fb97d34c44437bd95805427caf964 |
| رقم الأكسشن: | edsdoj.697fb97d34c44437bd95805427caf964 |
| قاعدة البيانات: | Directory of Open Access Journals |
Full Text Finder | تدمد: | 14248220 95805427 |
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| DOI: | 10.3390/s130100865 |