دورية أكاديمية

Hybrid height and slope figuring method for grazing-incidence reflective optics

التفاصيل البيبلوغرافية
العنوان: Hybrid height and slope figuring method for grazing-incidence reflective optics
المؤلفون: Tianyi Wang, Lei Huang, Xiaolong Ke, Yi Zhu, Heejoo Choi, Weslin Pullen, Vipender Negi, Daewook Kim, Mourad Idir
المصدر: Journal of Synchrotron Radiation, Vol 30, Iss 1, Pp 65-75 (2023)
بيانات النشر: International Union of Crystallography, 2023.
سنة النشر: 2023
المجموعة: LCC:Nuclear and particle physics. Atomic energy. Radioactivity
LCC:Crystallography
مصطلحات موضوعية: ion beam figuring, synchrotron optics, two-dimensional, surface slopes, Nuclear and particle physics. Atomic energy. Radioactivity, QC770-798, Crystallography, QD901-999
الوصف: Grazing-incidence reflective optics are commonly used in synchrotron radiation and free-electron laser facilities to transport and focus the emitted X-ray beams. To preserve the imaging capability at the diffraction limit, the fabrication of these optics requires precise control of both the residual height and slope errors. However, all the surface figuring methods are height based, lacking the explicit control of surface slopes. Although our preliminary work demonstrated a one-dimensional (1D) slope-based figuring model, its 2D extension is not straightforward. In this study, a novel 2D slope-based figuring method is proposed, which employs an alternating objective optimization on the slopes in the x- and y-directions directly. An analytical simulation revealed that the slope-based method achieved smaller residual slope errors than the height-based method, while the height-based method achieved smaller residual height errors than the slope-based method. Therefore, a hybrid height and slope figuring method was proposed to further enable explicit control of both the height and slopes according to the final mirror specifications. An experiment to finish an elliptical-cylindrical mirror using the hybrid method with ion beam figuring was then performed. Both the residual height and slope errors converged below the specified threshold values, which verified the feasibility and effectiveness of the proposed ideas.
نوع الوثيقة: article
وصف الملف: electronic resource
اللغة: English
تدمد: 1600-5775
16005775
66695341
Relation: http://scripts.iucr.org/cgi-bin/paper?S160057752201058X; https://doaj.org/toc/1600-5775
DOI: 10.1107/S160057752201058X
URL الوصول: https://doaj.org/article/6fb1fb511bab4846813e263e66695341
رقم الأكسشن: edsdoj.6fb1fb511bab4846813e263e66695341
قاعدة البيانات: Directory of Open Access Journals
الوصف
تدمد:16005775
66695341
DOI:10.1107/S160057752201058X