دورية أكاديمية
Large-scale vivid metasurface color printing using advanced 12-in. immersion photolithography
العنوان: | Large-scale vivid metasurface color printing using advanced 12-in. immersion photolithography |
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المؤلفون: | Egor Khaidarov, Damien Eschimese, Keng Heng Lai, Aihong Huang, Yuan Hsing Fu, Qunying Lin, Ramon Paniagua-Dominguez, Arseniy I. Kuznetsov |
المصدر: | Scientific Reports, Vol 12, Iss 1, Pp 1-6 (2022) |
بيانات النشر: | Nature Portfolio, 2022. |
سنة النشر: | 2022 |
المجموعة: | LCC:Medicine LCC:Science |
مصطلحات موضوعية: | Medicine, Science |
الوصف: | Abstract Nanostructures exhibiting optical resonances (so-called nanoantennas) have strong potential for applications in color printing and filtering with sub-wavelength resolution. While small scale demonstrations of these systems are interesting as a proof-of-concept, their large scale and volume fabrication requires deeper analysis and further development for industrial adoption. Here, we evaluate the color quality produced by large size nanoantenna arrays fabricated on a 12-in. wafer using deep UV immersion photolithography and dry etching processes. The color reproduction and quality are analyzed in context of the CIE color diagram, showing that a vivid and vibrant color palette, almost fully covering the sRGB color space, can be obtained with this mass-manufacturing-ready fabrication process. The obtained results, thus, provide a solid foundation for the potential industrial adoption of this emerging technology and expose the limits and challenges of the process. |
نوع الوثيقة: | article |
وصف الملف: | electronic resource |
اللغة: | English |
تدمد: | 2045-2322 |
Relation: | https://doaj.org/toc/2045-2322 |
DOI: | 10.1038/s41598-022-18259-9 |
URL الوصول: | https://doaj.org/article/71250cd549d4472cade70e1c8662d345 |
رقم الأكسشن: | edsdoj.71250cd549d4472cade70e1c8662d345 |
قاعدة البيانات: | Directory of Open Access Journals |
تدمد: | 20452322 |
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DOI: | 10.1038/s41598-022-18259-9 |