دورية أكاديمية
أعرض في EDS

Large-scale vivid metasurface color printing using advanced 12-in. immersion photolithography

التفاصيل البيبلوغرافية
العنوان: Large-scale vivid metasurface color printing using advanced 12-in. immersion photolithography
المؤلفون: Egor Khaidarov, Damien Eschimese, Keng Heng Lai, Aihong Huang, Yuan Hsing Fu, Qunying Lin, Ramon Paniagua-Dominguez, Arseniy I. Kuznetsov
المصدر: Scientific Reports, Vol 12, Iss 1, Pp 1-6 (2022)
بيانات النشر: Nature Portfolio, 2022.
سنة النشر: 2022
المجموعة: LCC:Medicine
LCC:Science
مصطلحات موضوعية: Medicine, Science
الوصف: Abstract Nanostructures exhibiting optical resonances (so-called nanoantennas) have strong potential for applications in color printing and filtering with sub-wavelength resolution. While small scale demonstrations of these systems are interesting as a proof-of-concept, their large scale and volume fabrication requires deeper analysis and further development for industrial adoption. Here, we evaluate the color quality produced by large size nanoantenna arrays fabricated on a 12-in. wafer using deep UV immersion photolithography and dry etching processes. The color reproduction and quality are analyzed in context of the CIE color diagram, showing that a vivid and vibrant color palette, almost fully covering the sRGB color space, can be obtained with this mass-manufacturing-ready fabrication process. The obtained results, thus, provide a solid foundation for the potential industrial adoption of this emerging technology and expose the limits and challenges of the process.
نوع الوثيقة: article
وصف الملف: electronic resource
اللغة: English
تدمد: 2045-2322
Relation: https://doaj.org/toc/2045-2322
DOI: 10.1038/s41598-022-18259-9
URL الوصول: https://doaj.org/article/71250cd549d4472cade70e1c8662d345
رقم الأكسشن: edsdoj.71250cd549d4472cade70e1c8662d345
قاعدة البيانات: Directory of Open Access Journals
الوصف
تدمد:20452322
DOI:10.1038/s41598-022-18259-9