دورية أكاديمية

Stoichiometric Cr2AlC MAX phase coatings deposited by HPPMS from composite targets using industrial deposition technology

التفاصيل البيبلوغرافية
العنوان: Stoichiometric Cr2AlC MAX phase coatings deposited by HPPMS from composite targets using industrial deposition technology
المؤلفون: Yu-Ping Chien, Stanislav Mráz, Clio Azina, Szilárd Kolozsvári, Peter Polcik, Jochen M. Schneider
المصدر: Open Ceramics, Vol 17, Iss , Pp 100538- (2024)
بيانات النشر: Elsevier, 2024.
سنة النشر: 2024
المجموعة: LCC:Clay industries. Ceramics. Glass
مصطلحات موضوعية: Magnetron sputtering, Substrate rotation, HIPIMS, Cr2AlC MAX phase, Thin films, Clay industries. Ceramics. Glass, TP785-869
الوصف: Compositionally-graded Cr2AlC coatings were deposited from composite targets with Al concentration gradients along the long-axis of the targets, ranging from 20.0 to 30.0 at.%, in an industrial plant. Stoichiometric Cr2AlC coatings deposited by HPPMS with a peak-power density of 217 W/cm2 and at substrate bias potential of −100 V require an Al concentration in the target of 30.0 at.% to compensate for the Al-loss induced by preferential re-sputtering and thermally induced desorption at these deposition conditions. The HPPMS deposition of a stoichiometric Cr2AlC coating at floating potential can be attained from a target segment containing 26.4 at.% of Al. Hence, during synthesis at 560 °C in an industrial deposition system with two-fold rotation significant deviations between target and coating composition were observed. It was demonstrated that these ion energy and power density induced reductions in Al concentration can be compensated for by utilizing Al-rich composite targets.
نوع الوثيقة: article
وصف الملف: electronic resource
اللغة: English
تدمد: 2666-5395
Relation: http://www.sciencedirect.com/science/article/pii/S2666539524000026; https://doaj.org/toc/2666-5395
DOI: 10.1016/j.oceram.2024.100538
URL الوصول: https://doaj.org/article/71eedb62a7e4477ab27057fac21ca33e
رقم الأكسشن: edsdoj.71eedb62a7e4477ab27057fac21ca33e
قاعدة البيانات: Directory of Open Access Journals
الوصف
تدمد:26665395
DOI:10.1016/j.oceram.2024.100538