دورية أكاديمية
A rolled-up-based fabrication method of 3D helical microrobots
العنوان: | A rolled-up-based fabrication method of 3D helical microrobots |
---|---|
المؤلفون: | Zihan Wang, Xueliang Mu, Liyuan Tan, Yukun Zhong, U. Kei Cheang |
المصدر: | Frontiers in Robotics and AI, Vol 9 (2022) |
بيانات النشر: | Frontiers Media S.A., 2022. |
سنة النشر: | 2022 |
المجموعة: | LCC:Mechanical engineering and machinery LCC:Electronic computers. Computer science |
مصطلحات موضوعية: | rolled-up technology, swelling effect, helical microrobots, controllable, feedback control strategy, Mechanical engineering and machinery, TJ1-1570, Electronic computers. Computer science, QA75.5-76.95 |
الوصف: | While the potential of using helical microrobots for biomedical applications, such as cargo transport, drug delivery, and micromanipulation, had been demonstrated, the viability to use them for practical applications is hindered by the cost, speed, and repeatability of current fabrication techniques. Hence, this paper introduces a simple, low-cost, high-throughput manufacturing process for single nickel layer helical microrobots with consistent dimensions. Photolithography and electron-beam (e-beam) evaporation were used to fabricate 2D parallelogram patterns that were sequentially rolled up into helical microstructures through the swelling effect of a photoresist sacrificial layer. Helical parameters were controlled by adjusting the geometric parameters of parallelogram patterns. To validate the fabrication process and characterize the microrobots’ mobility, we characterized the structures and surface morphology of the microrobots using a scanning electron microscope and tested their steerability using feedback control, respectively. Finally, we conducted a benchmark comparison to demonstrate that the fabrication method can produce helical microrobots with swimming properties comparable to previously reported microrobots. |
نوع الوثيقة: | article |
وصف الملف: | electronic resource |
اللغة: | English |
تدمد: | 2296-9144 |
Relation: | https://www.frontiersin.org/articles/10.3389/frobt.2022.1063987/full; https://doaj.org/toc/2296-9144 |
DOI: | 10.3389/frobt.2022.1063987 |
URL الوصول: | https://doaj.org/article/78843f113f664bca9f79681f32623700 |
رقم الأكسشن: | edsdoj.78843f113f664bca9f79681f32623700 |
قاعدة البيانات: | Directory of Open Access Journals |
تدمد: | 22969144 |
---|---|
DOI: | 10.3389/frobt.2022.1063987 |