دورية أكاديمية

Monolithic full-color active-matrix micro-LED micro-display using InGaN/AlGaInP heterogeneous integration

التفاصيل البيبلوغرافية
العنوان: Monolithic full-color active-matrix micro-LED micro-display using InGaN/AlGaInP heterogeneous integration
المؤلفون: Longheng Qi, Peian Li, Xu Zhang, Ka Ming Wong, Kei May Lau
المصدر: Light: Science & Applications, Vol 12, Iss 1, Pp 1-9 (2023)
بيانات النشر: Nature Publishing Group, 2023.
سنة النشر: 2023
المجموعة: LCC:Applied optics. Photonics
LCC:Optics. Light
مصطلحات موضوعية: Applied optics. Photonics, TA1501-1820, Optics. Light, QC350-467
الوصف: Abstract A prototype of full-color active-matrix micro-light-emitting diode (micro-LED) micro-display with a pixel density of 391 pixel per inch (ppi) using InGaN/AlGaInP heterogeneous integration is demonstrated. InGaN blue/green dual-color micro-LED arrays realized on a single metal organic chemical vapor deposition (MOCVD)-grown GaN-on-Si epiwafer and AlGaInP red micro-LED arrays are both monolithically fabricated, followed by the integration with a common complementary metal oxide semiconductor (CMOS) backplane via flip-chip bonding technology to form a double-layer thin-film display structure. Full-color images with decent color gamut and brightness are successfully displayed through the fine adjustment of driving current densities of RGB subpixels. This full-color display combines the advantages of high quantum efficiency of InGaN material on blue/green light and AlGaInP material on red light through heterogeneous integration and high pixel density through monolithic fabrication approach, demonstrating the feasibility and prospects of high brightness, good color performance, and high-resolution micro-LED micro-displays in future metaverse applications.
نوع الوثيقة: article
وصف الملف: electronic resource
اللغة: English
تدمد: 2047-7538
Relation: https://doaj.org/toc/2047-7538
DOI: 10.1038/s41377-023-01298-w
URL الوصول: https://doaj.org/article/b161bda6b2f74f35a4cf85efcfa5fa65
رقم الأكسشن: edsdoj.b161bda6b2f74f35a4cf85efcfa5fa65
قاعدة البيانات: Directory of Open Access Journals
الوصف
تدمد:20477538
DOI:10.1038/s41377-023-01298-w