SnO2 thin films were prepared by conventional and Glancing Angle Deposition reactive sputtering, and their gas sensing properties were investigated. The porosity of the as-prepared films was widely assessed using optical methods, and the sensing performances of these active layers were correlated with the evolution of surface and film porosity as a function of deposition conditions and annealing treatment. The sensor made of inclined columns grown at high sputtering pressure (6 × 10−3 mbar) and annealed at 500 °C in air exhibited the best response to benzene, with a limit of detection of 30 ppb. In addition, successful BTEX (i.e., benzene, toluene, ethylbenzene, and xylenes) discrimination was achieved by combining the sensing signals of four nanostructured tin-oxide-based gas sensors.
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