دورية أكاديمية
Nanostructuring of SnO2 Thin Films by Associating Glancing Angle Deposition and Sputtering Pressure for Gas Sensing Applications
العنوان: | Nanostructuring of SnO2 Thin Films by Associating Glancing Angle Deposition and Sputtering Pressure for Gas Sensing Applications |
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المؤلفون: | Achraf El Mohajir, Mohammad Arab Pour Yazdi, Anna Krystianiak, Olivier Heintz, Nicolas Martin, Franck Berger, Jean-Baptiste Sanchez |
المصدر: | Chemosensors, Vol 10, Iss 10, p 426 (2022) |
بيانات النشر: | MDPI AG, 2022. |
سنة النشر: | 2022 |
المجموعة: | LCC:Biochemistry |
مصطلحات موضوعية: | GLAD, SnO2, nanocolumns, BTEX gas sensor, porous architecture, Biochemistry, QD415-436 |
الوصف: | SnO2 thin films were prepared by conventional and Glancing Angle Deposition reactive sputtering, and their gas sensing properties were investigated. The porosity of the as-prepared films was widely assessed using optical methods, and the sensing performances of these active layers were correlated with the evolution of surface and film porosity as a function of deposition conditions and annealing treatment. The sensor made of inclined columns grown at high sputtering pressure (6 × 10−3 mbar) and annealed at 500 °C in air exhibited the best response to benzene, with a limit of detection of 30 ppb. In addition, successful BTEX (i.e., benzene, toluene, ethylbenzene, and xylenes) discrimination was achieved by combining the sensing signals of four nanostructured tin-oxide-based gas sensors. |
نوع الوثيقة: | article |
وصف الملف: | electronic resource |
اللغة: | English |
تدمد: | 2227-9040 |
Relation: | https://www.mdpi.com/2227-9040/10/10/426; https://doaj.org/toc/2227-9040 |
DOI: | 10.3390/chemosensors10100426 |
URL الوصول: | https://doaj.org/article/b48948b9ffc042ee9230a42d7667875e |
رقم الأكسشن: | edsdoj.b48948b9ffc042ee9230a42d7667875e |
قاعدة البيانات: | Directory of Open Access Journals |
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