This paper proposed a compact, high-sensitive S-band microwave sensor for low permittivity characterization. The proposed microwave sensor is inspired by a metamaterials-based maze-shaped split-ring resonator (MS-SRR) configuration, and its overall dimensions are 25 mm × 20 mm × 0.79 mm. The unloaded state of the proposed sensor achieved two robust band-stop notches in its transmission response at 2.77 GHz and 3.08 GHz, respectively. These distinctive features enable the real-time measurement of permittivity in low-permittivity materials. The MS-SRR configuration accomplished strong electric-field intensity, which increased the interaction between the field and testing material, resulting in a highly sensitive measurement. A sensitivity of 11.91% is observed for the first resonance peak and 12.01% for the second peak within the permittivity range from 1 to 2.0. Moreover, the proposed sensor is also competent in measuring the permittivity range between 3 and 10 with a sensitivity of 9.47%–4.93% for the first peak and 9.57%–4.83% for the second peak. The resonance frequency shifting by the influence of material under test (MUT) is presented as a function of permittivity using a regression model. The simulated, measured and formulated results agree well. Finally, the proposed compact and high-sensitive microwave sensor holds promise for low permittivity characterization applications.
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