We have demonstrated the generation of circularly polarized coherent light pulses at 66 nm wavelength by combining laser seeding at 263 nm of a 375 MeV relativistic electron bunch with subsequent coherent harmonic generation from an elliptical undulator of APPLE-II type. Coherent pulses at higher harmonics in linear polarization have been produced and recorded up to the sixth order (44 nm). The duration of the generated pulses depends on the temporal overlap of the initial seed laser pulse and the electron bunch and was on the order of 200 fs. Currently, this setup is the only source worldwide producing coherent fs-light pulses with variable polarization in the vacuum ultraviolet.