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Experiment Research on Micro-/Nano Processing Technology of Graphite as Basic MEMS Material

التفاصيل البيبلوغرافية
العنوان: Experiment Research on Micro-/Nano Processing Technology of Graphite as Basic MEMS Material
المؤلفون: Cheng Zhang, Yijin Liu, Mingge Wu, Ningbo Liao
المصدر: Applied Sciences, Vol 9, Iss 15, p 3103 (2019)
بيانات النشر: MDPI AG, 2019.
سنة النشر: 2019
المجموعة: LCC:Technology
LCC:Engineering (General). Civil engineering (General)
LCC:Biology (General)
LCC:Physics
LCC:Chemistry
مصطلحات موضوعية: graphite, MEMS, micro-/nanoprocessing, lithography, etching, Technology, Engineering (General). Civil engineering (General), TA1-2040, Biology (General), QH301-705.5, Physics, QC1-999, Chemistry, QD1-999
الوصف: Graphite is expected to be a common choice for basic microelectromechanical-system (MEMS) material in the future. However, in order to become a basic MEMS material, it is very important for graphite to be adapted to the commonly-used micro-/nanoprocessing technology. Therefore, this paper used a directly lithography and etching process to study micro-, /nanoprocessing on graphite. The results show that the graphite surface is suitable for lithography, and that different shapes and sizes of photoresist patterns can be directly fabricated on the graphite surface. In addition, the micro-meter height of photoresist could still resist plasma etching when process nanometers height of graphite structures. Therefore, graphite with photoresist patterns were directly processed by etching, and nanometer amounts of graphite were etched. Moreover, micro-/nanoscale graphite structure with height ranges from 29.4 nm−30.9 nm were fabricated with about 23° sidewall.
نوع الوثيقة: article
وصف الملف: electronic resource
اللغة: English
تدمد: 2076-3417
Relation: https://www.mdpi.com/2076-3417/9/15/3103; https://doaj.org/toc/2076-3417
DOI: 10.3390/app9153103
URL الوصول: https://doaj.org/article/f9999c5f354b4c6094171a25d32765f2
رقم الأكسشن: edsdoj.f9999c5f354b4c6094171a25d32765f2
قاعدة البيانات: Directory of Open Access Journals
الوصف
تدمد:20763417
DOI:10.3390/app9153103