دورية أكاديمية
أعرض في EDS

High sensitivity and high resolution element 3D analysis by a combined SIMS–SPM instrument

التفاصيل البيبلوغرافية
العنوان: High sensitivity and high resolution element 3D analysis by a combined SIMS–SPM instrument
المؤلفون: Yves Fleming, Tom Wirtz
المصدر: Beilstein Journal of Nanotechnology, Vol 6, Iss 1, Pp 1091-1099 (2015)
بيانات النشر: Beilstein-Institut, 2015.
سنة النشر: 2015
المجموعة: LCC:Technology
LCC:Chemical technology
LCC:Science
LCC:Physics
مصطلحات موضوعية: alloy, atomic force microscopy (AFM), correlative microscopy, differential sputtering, in situ, multimodal imaging, nano-cluster, polymer blend, secondary ion mass spectrometry (SIMS), scanning probe microscopy (SPM), SIMS artefacts, sputter-induced effects, sputter rate, Technology, Chemical technology, TP1-1185, Science, Physics, QC1-999
الوصف: Using the recently developed SIMS–SPM prototype, secondary ion mass spectrometry (SIMS) data was combined with topographical data from the scanning probe microscopy (SPM) module for five test structures in order to obtain accurate chemical 3D maps: a polystyrene/polyvinylpyrrolidone (PS/PVP) polymer blend, a nickel-based super-alloy, a titanium carbonitride-based cermet, a reticle test structure and Mg(OH)2 nanoclusters incorporated inside a polymer matrix. The examples illustrate the potential of this combined approach to track and eliminate artefacts related to inhomogeneities of the sputter rates (caused by samples containing various materials, different phases or having a non-flat surface) and inhomogeneities of the secondary ion extraction efficiencies due to local field distortions (caused by topography with high aspect ratios). In this respect, this paper presents the measured relative sputter rates between PVP and PS as well as in between the different phases of the TiCN cermet.
نوع الوثيقة: article
وصف الملف: electronic resource
اللغة: English
تدمد: 2190-4286
Relation: https://doaj.org/toc/2190-4286
DOI: 10.3762/bjnano.6.110
URL الوصول: https://doaj.org/article/feb799dccf5a47f0a0dfabf9102cb493
رقم الأكسشن: edsdoj.feb799dccf5a47f0a0dfabf9102cb493
قاعدة البيانات: Directory of Open Access Journals
الوصف
تدمد:21904286
DOI:10.3762/bjnano.6.110