Failure Analysis Case Study on Covalent Wafer bonding Delamination

التفاصيل البيبلوغرافية
العنوان: Failure Analysis Case Study on Covalent Wafer bonding Delamination
المؤلفون: Tang, L.J., Woo, Jasmine, Chew, Michelle, Lee, Kenneth, Chi, Ting Ta
المصدر: 2022 IEEE 24th Electronics Packaging Technology Conference (EPTC) Electronics Packaging Technology Conference (EPTC), 2022 IEEE 24th. :783-786 Dec, 2022
Relation: 2022 IEEE 24th Electronics Packaging Technology Conference (EPTC)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9798350398854
9798350398847
DOI:10.1109/EPTC56328.2022.10013251