Low thermal budget PBTI and NBTI reliability solutions for multi-Vth CMOS RMG stacks based on atomic oxygen and hydrogen treatments

التفاصيل البيبلوغرافية
العنوان:	Low thermal budget PBTI and NBTI reliability solutions for multi-Vth CMOS RMG stacks based on atomic oxygen and hydrogen treatments
المؤلفون:	Franco, J., Arimura, H., De Marneffe, J.-F., Claes, D., Brus, S., Vandooren, A., Litta, E. Dentoni, Horiguchi, N., Croes, K., Kaczer, B.
المصدر:	2022 International Electron Devices Meeting (IEDM) Electron Devices Meeting (IEDM), 2022 International. :30.4.1-30.4.4 Dec, 2022
Relation:	2022 IEEE International Electron Devices Meeting (IEDM)
قاعدة البيانات:	IEEE Xplore Digital Library