FinFETs with Thermally Stable RMG Gate Stack for Future DRAM Peripheral Circuits

التفاصيل البيبلوغرافية
العنوان:	FinFETs with Thermally Stable RMG Gate Stack for Future DRAM Peripheral Circuits
المؤلفون:	Capogreco, E., Arimura, H., Ritzenthaler, R., Brus, S., Oniki, Y., Dupuy, E., Sebaai, F., Radisic, D., Chan, B. T., Zhou, D., Machkaoutsan, V., Yoon, S., Itokawa, H., Yamaguchi, M., Gao, Z., Fazan, P., Chen, Y., Subramanian, S., Ragnarsson, L.-A., Spessot, A., Litta, E. Dentoni, Horiguchi, N.
المصدر:	2022 International Electron Devices Meeting (IEDM) Electron Devices Meeting (IEDM), 2022 International. :26.2.1-26.2.4 Dec, 2022
Relation:	2022 IEEE International Electron Devices Meeting (IEDM)
قاعدة البيانات:	IEEE Xplore Digital Library