التفاصيل البيبلوغرافية
| العنوان: |
Study on the effectiveness of protective methods for AlN film during SAW resonator fabrication |
| المؤلفون: |
Zhou, Yixin, Chang, Yi, Wang, Xuetian, Gao, Hongmin |
| المصدر: |
2022 International Conference on Microwave and Millimeter Wave Technology (ICMMT) Microwave and Millimeter Wave Technology (ICMMT), 2022 International Conference on. :1-3 Aug, 2022 |
| Relation: |
2022 International Conference on Microwave and Millimeter Wave Technology (ICMMT) |
| قاعدة البيانات: |
IEEE Xplore Digital Library |
