Data-driven Modeling for Production Dynamics

التفاصيل البيبلوغرافية
العنوان: Data-driven Modeling for Production Dynamics
المؤلفون: Arima, Sumika, Sasaki, Yu, Morie, Sho, Kataoka, Yuto, Mao, Chending, Lin, Jia
المصدر: 2022 International Symposium on Semiconductor Manufacturing (ISSM) Semiconductor Manufacturing (ISSM), 2022 International Symposium on. :1-4 Dec, 2022
Relation: 2022 International Symposium on Semiconductor Manufacturing (ISSM)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781665471336
DOI:10.1109/ISSM55802.2022.10026908