مؤتمر
Top surface imaging lithography processes for I-line resists using liquid-phase silylation
| العنوان: | Top surface imaging lithography processes for I-line resists using liquid-phase silylation |
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| المؤلفون: | Arshak, K., Mihov, M., Arshak, A., McDonagh, D. |
| المصدر: | 2002 23rd International Conference on Microelectronics. Proceedings (Cat. No.02TH8595) Microelectronics Microelectronics, 2002. MIEL 2002. 23rd International Conference on. 2:503-508 vol.2 2002 |
| Relation: | Proceedings of 23rd International Conference on Microelectronics (MIEL 2002) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 0780372352 9780780372351 |
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| DOI: | 10.1109/MIEL.2002.1003307 |