Comparative Study of Linbo3 and ALN Based Saw Temperature Devices

التفاصيل البيبلوغرافية
العنوان: Comparative Study of Linbo3 and ALN Based Saw Temperature Devices
المؤلفون: Wang, Qiuyan, Zhang, LinWei, Lou, Liang
المصدر: 2022 16th Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA) Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA), 2022 16th Symposium on. :815-818 Oct, 2022
Relation: 2022 16th Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9798350320800
DOI:10.1109/SPAWDA56268.2022.10045912