التفاصيل البيبلوغرافية
| العنوان: |
3d Self-Aligned Fabrication of Suspended Nanowires by Crystallographic Nanolithography |
| المؤلفون: |
Berenschot, Erwin J.W., Pordeli, Yasser, Kooijman, Lucas J., Janssens, Yves L., Tiggelaar, Roald M., Tas, Niels R. |
| المصدر: |
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2023 IEEE 36th International Conference on. :639-642 Jan, 2023 |
| Relation: |
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) |
| قاعدة البيانات: |
IEEE Xplore Digital Library |
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