التفاصيل البيبلوغرافية
| العنوان: |
A Self-Corrected, Self-Cleaned MEMS and Suitable for Advanced Foundry Multi-Project Wafer (MPW) |
| المؤلفون: |
Kumar, Sushil, Arya, Dhairya Singh, Garg, Manu, Singh, Pushpapraj |
| المصدر: |
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2023 IEEE 36th International Conference on. :570-573 Jan, 2023 |
| Relation: |
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) |
| قاعدة البيانات: |
IEEE Xplore Digital Library |
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