التفاصيل البيبلوغرافية
العنوان: |
A Self-Corrected, Self-Cleaned MEMS and Suitable for Advanced Foundry Multi-Project Wafer (MPW) |
المؤلفون: |
Kumar, Sushil, Arya, Dhairya Singh, Garg, Manu, Singh, Pushpapraj |
المصدر: |
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2023 IEEE 36th International Conference on. :570-573 Jan, 2023 |
Relation: |
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) |
قاعدة البيانات: |
IEEE Xplore Digital Library |