التفاصيل البيبلوغرافية
| العنوان: |
Generic Temperature Compensation Scheme for CMOS-MEMS Resonators Based on ARC-Beam Derived Electrical Stiffness Frequency Pulling |
| المؤلفون: |
Hsieh, I-Chieh, Zheng, Hong-Sen, Tsai, Chun-Pu, Chen, Ting-Yi, Li, Wei-Chang |
| المصدر: |
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2023 IEEE 36th International Conference on. :1155-1158 Jan, 2023 |
| Relation: |
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) |
| قاعدة البيانات: |
IEEE Xplore Digital Library |
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