التفاصيل البيبلوغرافية
العنوان: |
Design of Butterfly Plate Piezoelectric Actuator with Dual Driving Electrodes for MEMS Micro-Mirror |
المؤلفون: |
Chen, Si-Han, Liu, Shih-Chi, Cheng, Hao-Chien, Lin, Hung-Yu, Liang, Kai-Chih, Wu, Mingching, Fang, Weileun |
المصدر: |
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2023 IEEE 36th International Conference on. :720-723 Jan, 2023 |
Relation: |
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) |
قاعدة البيانات: |
IEEE Xplore Digital Library |