Design of Butterfly Plate Piezoelectric Actuator with Dual Driving Electrodes for MEMS Micro-Mirror

التفاصيل البيبلوغرافية
العنوان: Design of Butterfly Plate Piezoelectric Actuator with Dual Driving Electrodes for MEMS Micro-Mirror
المؤلفون: Chen, Si-Han, Liu, Shih-Chi, Cheng, Hao-Chien, Lin, Hung-Yu, Liang, Kai-Chih, Wu, Mingching, Fang, Weileun
المصدر: 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2023 IEEE 36th International Conference on. :720-723 Jan, 2023
Relation: 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781665493086
تدمد:21601968
DOI:10.1109/MEMS49605.2023.10052250