التفاصيل البيبلوغرافية
| العنوان: |
Piezoelectrically Actuated Micromirror with Dynamic Deformation Compensation Mechanism |
| المؤلفون: |
Sasaki, Takashi, Piot, Adrien, Pribosek, Jaka, Lagosh, Anton, Fleury, Clement, Bainschab, Markus, Zhai, Yanfen, Baumgart, Marcus, Guerreiro, Sara, Holzmann, Dominik, Travnik, Ales, Moridi, Mohssen |
| المصدر: |
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2023 IEEE 36th International Conference on. :1123-1126 Jan, 2023 |
| Relation: |
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) |
| قاعدة البيانات: |
IEEE Xplore Digital Library |
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