التفاصيل البيبلوغرافية
| العنوان: |
A CMOS Compatible Micro Pirani Gauge with Structure Optimization for Performance Enhancement |
| المؤلفون: |
Jiao, Rui, Yang, Gai, Wang, Ruoqin, Tang, Yue, Liu, Zhongyi, Xie, Huikai, Yu, Hongyu, Wang, Xiaoyi |
| المصدر: |
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2023 IEEE 36th International Conference on. :752-755 Jan, 2023 |
| Relation: |
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) |
| قاعدة البيانات: |
IEEE Xplore Digital Library |
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