التفاصيل البيبلوغرافية
العنوان: |
Wafer-Level Patterning of Tin Oxide Nanosheets for MEMS Gas Sensors |
المؤلفون: |
Li, Mingjie, Luo, Wenxin, Liu, Xiaojiang, Niu, Gaoqiang, Wang, Fei |
المصدر: |
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2023 IEEE 36th International Conference on. :893-896 Jan, 2023 |
Relation: |
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) |
قاعدة البيانات: |
IEEE Xplore Digital Library |