مؤتمر
Wafer-Level Patterning of Tin Oxide Nanosheets for MEMS Gas Sensors
| العنوان: | Wafer-Level Patterning of Tin Oxide Nanosheets for MEMS Gas Sensors |
|---|---|
| المؤلفون: | Li, Mingjie, Luo, Wenxin, Liu, Xiaojiang, Niu, Gaoqiang, Wang, Fei |
| المصدر: | 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2023 IEEE 36th International Conference on. :893-896 Jan, 2023 |
| Relation: | 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder كن أول من يترك تعليقا!