مؤتمر
Wafer-Level Patterning of Tin Oxide Nanosheets for MEMS Gas Sensors
العنوان: | Wafer-Level Patterning of Tin Oxide Nanosheets for MEMS Gas Sensors |
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المؤلفون: | Li, Mingjie, Luo, Wenxin, Liu, Xiaojiang, Niu, Gaoqiang, Wang, Fei |
المصدر: | 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2023 IEEE 36th International Conference on. :893-896 Jan, 2023 |
Relation: | 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) |
قاعدة البيانات: | IEEE Xplore Digital Library |
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