التفاصيل البيبلوغرافية
| العنوان: |
Modal Quality Factor Inversion of Non-Slender Mems Resonators Between Gases and Liquids |
| المؤلفون: |
Gesing, Andre L., Tran, Thomas, Platz, Daniel, Schmid, Ulrich |
| المصدر: |
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2023 IEEE 36th International Conference on. :1072-1075 Jan, 2023 |
| Relation: |
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) |
| قاعدة البيانات: |
IEEE Xplore Digital Library |
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