التفاصيل البيبلوغرافية
العنوان: |
Andromeda: A Flexible MEMS Technology Platform for a Variety of Piezoelectrically Actuacted Micromirrors |
المؤلفون: |
Martini, Irene, Alessandri, Anna, Carminati, Marta, Carminati, Roberto, Ferrarini, Paolo, Gatti, Daniela A. L., Gianola, Riccardo, Lazarova, Borka, Lazzari, Carla M., Nomellini, Andrea, Oggioni, Laura, Pedrini, Claudia, Prelini, Carlo L., Tacchini, Riccardo, Vimercati, Michele |
المصدر: |
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2023 IEEE 36th International Conference on. :716-719 Jan, 2023 |
Relation: |
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) |
قاعدة البيانات: |
IEEE Xplore Digital Library |