Andromeda: A Flexible MEMS Technology Platform for a Variety of Piezoelectrically Actuacted Micromirrors

التفاصيل البيبلوغرافية
العنوان: Andromeda: A Flexible MEMS Technology Platform for a Variety of Piezoelectrically Actuacted Micromirrors
المؤلفون: Martini, Irene, Alessandri, Anna, Carminati, Marta, Carminati, Roberto, Ferrarini, Paolo, Gatti, Daniela A. L., Gianola, Riccardo, Lazarova, Borka, Lazzari, Carla M., Nomellini, Andrea, Oggioni, Laura, Pedrini, Claudia, Prelini, Carlo L., Tacchini, Riccardo, Vimercati, Michele
المصدر: 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2023 IEEE 36th International Conference on. :716-719 Jan, 2023
Relation: 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781665493086
تدمد:21601968
DOI:10.1109/MEMS49605.2023.10052507