Implementation of a Monolithic SoC Environmental Sensing Hub Using CMOS-MEMS Technique

التفاصيل البيبلوغرافية
العنوان: Implementation of a Monolithic SoC Environmental Sensing Hub Using CMOS-MEMS Technique
المؤلفون: Lee, Ya-Chu, Chien, Tung-Lin, Fang, Chi-Te, Huang, Yuanyuan, Sung, Wei-Lun, Chu, Yen-Chang, Chen, Rongshun, Fang, Weileun
المصدر: 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2023 IEEE 36th International Conference on. :562-565 Jan, 2023
Relation: 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781665493086
تدمد:21601968
DOI:10.1109/MEMS49605.2023.10052584