التفاصيل البيبلوغرافية
| العنوان: |
A Study on the Thermal Budget of Ferroelectric TiN/Hf0.5Zr0.5O2/TiN Capacitors for Next-Generation Memory Applications |
| المؤلفون: |
Park, Hye Ryeon, Yoo, Jeong Gyu, Kang, Jong Mook, Cho, Min Kwan, Gong, Taeho, Park, Seongbin, Lee, Seungbin, Kim, Jin-HYun, Lee, Seojun, Choi, Rino, Kim, Harrison Sejoon, Jung, Yong Chan, Kim, Jiyoung, Kim, Si Joon |
| المصدر: |
2023 7th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) Electron Devices Technology & Manufacturing Conference (EDTM), 2023 7th IEEE. :1-3 Mar, 2023 |
| Relation: |
2023 7th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) |
| قاعدة البيانات: |
IEEE Xplore Digital Library |
