التفاصيل البيبلوغرافية
| العنوان: |
c-Axis parallel ZnO piezoelectric multilayer for BAW gyroscope applications |
| المؤلفون: |
Hanai, Ayaka, Kudo, Shinya, Ekida, Kohei, Jia, Junjun, Yanagitani, Takahiko |
| المصدر: |
2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Inertial Sensors and Systems (INERTIAL), 2023 IEEE International Symposium on. :1-4 Mar, 2023 |
| Relation: |
2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) |
| قاعدة البيانات: |
IEEE Xplore Digital Library |
