Using dedicated device arrays for the characterization of TDDB in a scaled HK/MG technology

التفاصيل البيبلوغرافية
العنوان: Using dedicated device arrays for the characterization of TDDB in a scaled HK/MG technology
المؤلفون: Saraza-Canflanca, P., Diaz-Fortuny, J., Vici, A., Bury, E., Degraeve, R., Kaczer, B.
المصدر: 2023 IEEE International Reliability Physics Symposium (IRPS) Reliability Physics Symposium (IRPS), 2023 IEEE International. :1-6 Mar, 2023
Relation: 2023 IEEE International Reliability Physics Symposium (IRPS)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781665456722
تدمد:19381891
DOI:10.1109/IRPS48203.2023.10117773