مؤتمر
Using dedicated device arrays for the characterization of TDDB in a scaled HK/MG technology
العنوان: | Using dedicated device arrays for the characterization of TDDB in a scaled HK/MG technology |
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المؤلفون: | Saraza-Canflanca, P., Diaz-Fortuny, J., Vici, A., Bury, E., Degraeve, R., Kaczer, B. |
المصدر: | 2023 IEEE International Reliability Physics Symposium (IRPS) Reliability Physics Symposium (IRPS), 2023 IEEE International. :1-6 Mar, 2023 |
Relation: | 2023 IEEE International Reliability Physics Symposium (IRPS) |
قاعدة البيانات: | IEEE Xplore Digital Library |
ردمك: | 9781665456722 |
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تدمد: | 19381891 |
DOI: | 10.1109/IRPS48203.2023.10117773 |