التفاصيل البيبلوغرافية
العنوان: |
Innovative Approaches for RG 3D NAND CMP Buff Steps Elimination with Fab Cost and Carbon Footprint Reduction : GF: Green Factory |
المؤلفون: |
Dong, Xinqiao, Yong, Yaolun, Wong, Hsuehchuang, McCabe, Russell, Mukherjee, Subhadeep, Yang, Yi |
المصدر: |
2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) SEMI Advanced Semiconductor Manufacturing Conference (ASMC), 2023 34th Annual. :1-5 May, 2023 |
Relation: |
2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) |
قاعدة البيانات: |
IEEE Xplore Digital Library |