التفاصيل البيبلوغرافية
العنوان: |
Eliminating Polymer Flaking on a Passivation Etch Chamber using Carbon Polymer Coating Method |
المؤلفون: |
Igana, Noel Portes, Gozali, Rendy Wiyogo, Shiang, Loh Kim, Haiqing, Zhang |
المصدر: |
2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) SEMI Advanced Semiconductor Manufacturing Conference (ASMC), 2023 34th Annual. :1-4 May, 2023 |
Relation: |
2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) |
قاعدة البيانات: |
IEEE Xplore Digital Library |