مؤتمر
Eliminating Polymer Flaking on a Passivation Etch Chamber using Carbon Polymer Coating Method
| العنوان: | Eliminating Polymer Flaking on a Passivation Etch Chamber using Carbon Polymer Coating Method |
|---|---|
| المؤلفون: | Igana, Noel Portes, Gozali, Rendy Wiyogo, Shiang, Loh Kim, Haiqing, Zhang |
| المصدر: | 2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) SEMI Advanced Semiconductor Manufacturing Conference (ASMC), 2023 34th Annual. :1-4 May, 2023 |
| Relation: | 2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
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