دورية أكاديمية
High-Performance, Low-Cost On-Chip Fabry-Perot Interferometer With Microfluidic Channel Using Single Anisotropic Wet Etching
| العنوان: | High-Performance, Low-Cost On-Chip Fabry-Perot Interferometer With Microfluidic Channel Using Single Anisotropic Wet Etching |
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| المؤلفون: | Guertin, R., Lacasse, T., Lemieux-Leduc, C., Bianki, M., Peter, Y. |
| المصدر: | Journal of Microelectromechanical Systems J. Microelectromech. Syst. Microelectromechanical Systems, Journal of. 32(4):347-351 Aug, 2023 |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | تدمد: | 10577157 19410158 |
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| DOI: | 10.1109/JMEMS.2023.3278451 |