دورية أكاديمية
The Influence of Deposition Temperature and Material Stress on Low-Loss Silicon Nitride Films for Integrated Quantum Optics
| العنوان: | The Influence of Deposition Temperature and Material Stress on Low-Loss Silicon Nitride Films for Integrated Quantum Optics |
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| المؤلفون: | Tareki, A.M., Kupchak, C., Mnaymneh, K. |
| المصدر: | IEEE Photonics Journal IEEE Photonics J. Photonics Journal, IEEE. 15(4):1-7 Aug, 2023 |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | تدمد: | 19430655 19430647 |
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| DOI: | 10.1109/JPHOT.2023.3284204 |