Integration of high performance dual workfunction logic CMOS transistors with a dense 8F/sup 2/ vertical DRAM cell

التفاصيل البيبلوغرافية
العنوان: Integration of high performance dual workfunction logic CMOS transistors with a dense 8F/sup 2/ vertical DRAM cell
المؤلفون: Rengarajan, R., Malik, R., Haining Yang, Yan, W., Ramachandran, R., Boyong He, Divakaruni, R., Yujun Li
المصدر: 2002 Symposium on VLSI Technology. Digest of Technical Papers (Cat. No.01CH37303) VLSI technology VLSI Technology, 2002. Digest of Technical Papers. 2002 Symposium on. :58-59 2002
Relation: 2002 Symposium on VLSI Technology Digest of Technical Papers
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:078037312X
9780780373129
DOI:10.1109/VLSIT.2002.1015387